This inventor holds 3 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 1999-2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kyungki-do, KR (1999 - 2001)
- Suwon, KR (2004)
Company Filing History:
Years Active: 1999-2004
Title: Innovations by Tae-yeol Heo in Semiconductor Technology
Introduction
Tae-yeol Heo is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the reliability and efficiency of semiconductor devices through innovative inspection and analysis methods.
Latest Patents
One of Tae-yeol Heo's latest patents is a wafer surface inspection method. This method discriminates types of defects on a wafer based on measurements obtained from a wafer inspection system that includes multiple dark field detectors. The system determines whether specific conditions are met to classify defects accurately. If all conditions are satisfied, the defect is identified as a crystal originated particle; otherwise, it is classified as an actual particle.
Another notable patent is a method of analyzing the morphology of bulk and surface defects on semiconductor wafers. This method involves determining the location of defects, marking indications, milling the wafer to create a specimen, and analyzing the specimen to obtain defect morphology. The technique allows for the detection of bulk defects as deep as 5-250 µm and surface defects up to 10 µm from the wafer's surface. The use of Transmission Electron Microscopy (TEM) enhances the accuracy of the analysis, ultimately leading to improved reliability of semiconductor devices.
Career Highlights
Tae-yeol Heo is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the semiconductor field. His expertise and dedication to research have positioned him as a key figure in advancing semiconductor technology.
Collaborations
He has collaborated with notable colleagues, including Sung-hoon Cho and Gi-jung Kim, contributing to various projects that enhance semiconductor manufacturing processes.
Conclusion
Tae-yeol Heo's innovative patents and contributions to semiconductor technology demonstrate his commitment to improving device reliability and performance. His work continues to influence the industry positively, paving the way for future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile