Location History:
- Daejeon, KR (2016 - 2019)
- Icheon-si, KR (2024)
Company Filing History:
Years Active: 2016-2025
Title: Tae Joong Ha: Innovator in EUV Lithography
Introduction
Tae Joong Ha is a prominent inventor based in Daejeon, South Korea. He has made significant contributions to the field of extreme-ultraviolet (EUV) lithography, holding a total of 7 patents. His work focuses on advancing the technology used in semiconductor manufacturing.
Latest Patents
One of his latest patents is a phase shift mask for EUV lithography, along with a manufacturing method for this mask. The phase shift mask includes a substrate, a reflective layer, device patterns, a frame pattern, and phase shift patterns. The frame pattern features alignment holes that expose portions of the reflective layer, while the phase shift patterns overlap with the device patterns. This innovation is crucial for enhancing the precision and efficiency of lithography processes.
Career Highlights
Tae Joong Ha is currently employed at SK Hynix Inc., a leading semiconductor company. His role involves developing cutting-edge technologies that are essential for modern electronics. His expertise in EUV lithography has positioned him as a key player in the semiconductor industry.
Collaborations
He has collaborated with notable colleagues, including In Hwan Lee and Sun Young Koo. These partnerships have fostered a creative environment that encourages innovation and the development of advanced technologies.
Conclusion
Tae Joong Ha's contributions to EUV lithography and his innovative patents reflect his dedication to advancing semiconductor technology. His work continues to influence the industry and pave the way for future innovations.