This inventor holds 1 USPTO granted patent and 1 published patent application and 1 EPO patent. Top assignee: Ulvac, Inc.. Active years: 2014.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2014
Title: Tadayuki Satou: Innovator in Electrostatic Technology
Introduction
Tadayuki Satou is a notable inventor based in Susono, Japan. He has made significant contributions to the field of electrostatic technology, particularly through his innovative patent related to electrostatic chucks.
Latest Patents
Tadayuki Satou holds a patent for an electrostatic chuck and vacuum processing apparatus. This invention is designed to securely hold a translucent substrate during processing treatments that involve irradiating light. The electrostatic chuck features a chuck plate made of dielectric material, with two electrodes that create an attractive force to hold the substrate in place. This design ensures that the substrate remains securely held even when the attraction force diminishes due to the photoelectric effect.
Career Highlights
Tadayuki Satou is associated with Ulvac, Inc., a company known for its advancements in vacuum technology and processing equipment. His work has contributed to the development of more efficient and reliable processing methods in various applications.
Collaborations
Some of Tadayuki Satou's coworkers include Tadashi Oka and Kyuzo Nakamura, who collaborate with him in the pursuit of innovative solutions in their field.
Conclusion
Tadayuki Satou's contributions to electrostatic technology exemplify the importance of innovation in advancing processing techniques. His patent reflects a commitment to enhancing the reliability of substrate handling in various applications.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile