Ulvac, Inc.

Tadayuki Satou

Kyuzo Nakamura

Koukou Suu

Yasuhiro Morikawa

Tadashi Oka

Toshio Hayashi

An electrostatic chuck is provided which is arranged that, at the time of performing processing treatments of irradiating light to a to-be-processed substrate while holding the translucent to-be-processed substrate, the to-be-processed substrate can surely be held even in case the attraction force lowers due to photoelectric effect. An electrostatic chuck has a chuck plate made of a dielectric material, and a first electrode and a second electrode, both electrodes being disposed in the chuck plate. A voltage is applied between the first and the second electrodes to thereby attract the to-be-processed substrate S to the surface of the chuck plate. The electrostatic chuck has, on part of the surface of the chuck plate, a substrate holding sectionwhich is made of an adhesive sheet and the like having an adhesive force with respect to the to-be-processed substrate.

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Susono, Japan

Tadayuki Satou