Kanagawa, Japan

Tadashi Oka


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Susono, JP (2014)
  • Kanagawa, JP (2019)

Company Filing History:


Years Active: 2014-2019

where 'Filed Patents' based on already Granted Patents

2 patents (USPTO):

Title: The Innovations of Tadashi Oka

Introduction

Tadashi Oka is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of device structures and electrostatic chucks. With a total of 2 patents, Oka's work focuses on enhancing the functionality and reliability of various devices.

Latest Patents

One of Oka's latest patents is titled "Device structure and method of producing the same." This invention aims to provide a device structure that effectively prevents oxygen, water, and similar elements from entering the device. The device structure includes a substrate, a device layer, a first inorganic material layer, and a first resin material. The substrate has a first surface and a second surface, with the device layer arranged on at least the first surface. The first inorganic material layer is formed on the first surface, while the first resin material is unevenly arranged around it.

Another significant patent is the "Electrostatic chuck and vacuum processing apparatus." This invention features an electrostatic chuck designed to hold a translucent substrate during processing treatments, even when the attraction force decreases due to the photoelectric effect. The chuck plate is made of a dielectric material and contains both a first and a second electrode. A voltage is applied between these electrodes to attract the substrate to the chuck plate's surface. Additionally, the chuck plate includes a substrate holding section made of an adhesive sheet that maintains its adhesive force with respect to the substrate.

Career Highlights

Tadashi Oka is currently employed at Ulvac, Inc., where he continues to innovate and develop new technologies. His work has significantly impacted the field of device manufacturing and processing.

Collaborations

Oka has collaborated with notable coworkers, including Tadayuki Satou and Kyuzo Nakamura, contributing to various projects and advancements in their field.

Conclusion

Tadashi Oka's contributions to the field of inventions, particularly in device structures and electrostatic chucks, showcase his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving device functionality and reliability, making him a significant figure in the industry.

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