The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
May. 21, 2014
Ulvac, Inc., Kanagawa, JP;
Tadashi Oka, Kanagawa, JP;
Yuko Kato, Kanagawa, JP;
Takahiro Yajima, Kanagawa, JP;
Yousuke Matsumoto, Kanagawa, JP;
Shouta Kanai, Kanagawa, JP;
Yasuaki Murata, Kanagawa, JP;
ULVAC, INC., Chigasaki-Shi, Kanagawa, JP;
Abstract
To provide a device structure that is capable of preventing oxygen, water, and the like from entering the device, and a method of producing the same. A device structureaccording to an embodiment of the present invention includes a substrate (base), a device layer, a first inorganic material layer (convex portion), and a first resin material. The substratehas a first surfaceand a second surfaceopposite to the first surface. The device layeris arranged on at least the first surfaceout of the first and second surfacesand. The first inorganic material layeris formed on the first surface. The first resin materialis unevenly arranged around the first inorganic material layer