Company Filing History:
Years Active: 2021-2022
Title: The Innovations of Tadashi Nakasugi
Introduction
Tadashi Nakasugi is a prominent inventor based in Takasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his expertise and innovative spirit. His work primarily focuses on methods for heat-treating silicon single crystal wafers and manufacturing semiconductor devices.
Latest Patents
Nakasugi's latest patents include a method for heat-treating silicon single crystal wafers. This method aims to control the BMD density of the wafers to achieve a predetermined density through a specific RTA heat treatment process. The process involves formulating a relational equation to determine the appropriate RTA temperature for achieving the desired BMD density. This innovation is crucial for producing defect-free annealed or epitaxial wafers.
Another notable patent is a method for manufacturing semiconductor devices. This method includes forming a Fin structure on a silicon substrate, performing ion implantation, and conducting recovery heat treatment to recrystallize the silicon. The design of the Fin structure is carefully processed to prevent defects during ion implantation and recovery heat treatment, ensuring high-quality semiconductor devices.
Career Highlights
Tadashi Nakasugi is associated with Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor industry. His work at this company has allowed him to contribute to advancements in semiconductor technology and improve manufacturing processes.
Collaborations
Nakasugi has collaborated with notable coworkers such as Wei Feng Qu and Ken Sunakawa. Their combined expertise has likely fostered innovative solutions in their respective fields.
Conclusion
Tadashi Nakasugi's contributions to semiconductor technology through his patents and work at Shin-Etsu Handotai Co., Ltd. highlight his role as a key innovator in the industry. His methods for heat-treating silicon wafers and manufacturing semiconductor devices are significant advancements that continue to influence the field.