Aichi, Japan

Tadahiro Kitamura


Average Co-Inventor Count = 3.7

ph-index = 6

Forward Citations = 168(Granted Patents)


Location History:

  • Aichi, JP (2000 - 2004)
  • Nishikasugai-gun, JP (2004 - 2005)

Company Filing History:


Years Active: 2000-2005

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7 patents (USPTO):Explore Patents

Title: **Innovative Contributions of Tadahiro Kitamura**

Introduction

Tadahiro Kitamura, an accomplished inventor located in Aichi, Japan, has made significant contributions to the field of materials science and engineering. With a total of seven patents to his name, Kitamura’s work particularly focuses on polishing compositions and methods that enhance substrate preparation processes.

Latest Patents

Among his latest patents is a creative polishing composition that comprises various components, specifically designed for effective substrate processing. His method of polishing a copper layer of a substrate stands out; it aims to improve the stock removal rate efficiently. This innovative method involves several steps: supplying a substrate onto a polishing pad with a copper layer facing down, pressing the substrate onto the polishing pad via a backing pad propelled by a press head, and rotating the press head relative to the polishing plate while applying polishing slurry. The backing pad is crafted from a material with an Asker C hardness of 75-95 and a compressibility of 10% or less. The polishing slurry itself includes a chelating agent aimed at chelating copper, an etching agent for surface treatment of the copper layer, and an oxidizing agent, all combined with water to aid the polishing process.

Career Highlights

Tadahiro Kitamura has worked for notable companies, including Fujimi Incorporated, contributing to advancements in polishing and surface treatment technologies. His creative insights have led to enhanced applications in various industries requiring precise material finishing.

Collaborations

Throughout his career, Kitamura has collaborated with distinguished colleagues such as Katsuyoshi Ina and Kenji Sakai. These partnerships have been pivotal in driving innovation and developing patented techniques in the material processing domain.

Conclusion

Tadahiro Kitamura's innovative spirit and dedication have led to significant advancements in polishing methods and compositions, evidenced by his seven patents. His work not only reflects his expertise but also contributes to the ongoing evolution of technology in the materials science sector.

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