Location History:
- Kikuchi-Gun, JP (2003)
- Koshi, JP (2009 - 2010)
Company Filing History:
Years Active: 2003-2010
Title: Innovations by Syuzo Fujimaru
Introduction
Syuzo Fujimaru is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 3 patents to his name, Fujimaru's work focuses on improving the efficiency and effectiveness of coating and developing apparatuses.
Latest Patents
Fujimaru's latest patents include a coating and developing apparatus, an operating method for the same, and a storage medium for the method. His innovations in this area allow substrates without an appropriately formed protective film to be recovered without adversely affecting normal substrate processing efficiency. Additionally, the removal of protective films has been simplified. In his coating and developing apparatus, abnormal substrates that are not appropriately surface-coated during liquid-immersion light exposure are queued in a module instead of being loaded into an exposure unit. This method ensures that the processing efficiency remains intact.
Another significant patent involves a substrate processing method and apparatus. When trouble occurs and the operation of the substrate processing apparatus is halted, substrate information containing positions and processing states of the substrates is stored. Upon restarting the apparatus, the substrates are collected into a housing unit and transferred to processing units following the same transfer recipe as before the trouble occurred. This ensures that processing is only performed in units where it has not yet been completed.
Career Highlights
Fujimaru is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing the technology used in substrate processing.
Collaborations
Fujimaru has collaborated with notable coworkers such as Masanori Tateyama and Kensei Yamamoto. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Syuzo Fujimaru's innovative patents and contributions to substrate processing technology highlight his importance in the field. His work continues to influence advancements in the industry, showcasing the impact of dedicated inventors.