This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2004-2006.
Company Filing History:
Years Active: 2004-2006
Title: Syun-Ming Jeng: Innovator in Semiconductor Technology
Introduction
Syun-Ming Jeng is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in improving the performance and recycling of semiconductor wafers. With a total of 2 patents, his work has had a notable impact on the industry.
Latest Patents
Jeng's latest patents include a multi-step plasma treatment method designed to enhance the electrical performance of copper interconnects. This method involves plasma treating an exposed copper surface and dielectric insulating layer during the semiconductor device manufacturing process. The first step includes using ammonia and nitrogen plasma to form a copper nitride layer over the exposed copper portion. The second step involves plasma treating the surface with oxygen plasma.
Another significant patent is focused on recycling semiconductor wafers that have carbon-doped low-k dielectric layers. This method outlines a process for removing carbon-doped oxide layers from the surface of semiconductor wafers. It includes oxidizing the carbon-doped oxide layer to convert it into silicon oxide and subsequently wet etching the silicon oxide to remove it effectively.
Career Highlights
Syun-Ming Jeng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative approaches and patented methods have contributed to advancements in semiconductor manufacturing processes.
Collaborations
Throughout his career, Jeng has collaborated with notable colleagues, including Keng-Chu Lin and Hui-Lin Chang. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Syun-Ming Jeng's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.