Company Filing History:
Years Active: 2005-2009
Title: Innovations by Swaminathan (Sam) Sivakumar
Introduction
Swaminathan (Sam) Sivakumar is a notable inventor based in Portland, Oregon. With three patents to his name, he has made significant contributions to the field of technology, particularly in innovative printing techniques and features. His notable work is recognized in the highly competitive landscape of semiconductor technology through his role at Intel Corporation.
Latest Patents
Sivakumar's latest patents showcase his expertise in addressing challenges in advanced manufacturing. One of these is focused on sub-resolution assist features, which relate to the layout and utilization of such features to improve semiconductor manufacturing. This patent outlines a method wherein a mask includes a first feature and a second feature, separated by a gap, bridged by a sub-resolution assist feature.
Another significant patent involves accommodating diffraction in the printing of features on a substrate. This patent details a method for identifying pairs of features that need to be printed and adjusting the separation distance between the associated patterning elements while ensuring a sufficiently small pitch between the imaged features. This approach aims to maximize the precision and quality of printed features, even when diffraction could obscure the separation.
Career Highlights
Sivakumar's career at Intel Corporation has positioned him at the forefront of technological advancements. His background in innovation has enabled him to contribute to important projects that push the boundaries of what is possible in semiconductor design and manufacturing.
Collaborations
Throughout his career, Sivakumar has collaborated with prominent colleagues, including Rex K. Frost and Charles Henry Wallace. These partnerships underscore the collaborative spirit prevalent in research and development, leading to breakthroughs that drive the industry forward.
Conclusion
Swaminathan (Sam) Sivakumar's innovative patents and contributions at Intel Corporation exemplify the impact of dedicated inventors in technology. His work in enhancing printing techniques and addressing complex challenges continues to pave the way for future advancements in semiconductor manufacturing.