Annaka, Japan

Susumu Kuwabara

USPTO Granted Patents = 13 

 

Average Co-Inventor Count = 1.7

ph-index = 3

Forward Citations = 106(Granted Patents)


Location History:

  • Gunma, JP (2003 - 2007)
  • Annaka, JP (1994 - 2024)

Company Filing History:


Years Active: 1994-2024

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13 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Susumu Kuwabara

Introduction

Susumu Kuwabara is a notable inventor based in Annaka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His work primarily focuses on methods for measuring film thickness distribution and manufacturing silicon-on-insulator (SOI) wafers.

Latest Patents

Kuwabara's latest patents include a method for measuring film thickness distribution of wafers with thin films. This method involves determining the height of focus using an optical microscope with an autofocus function, calculating the standard deviation of reflected-light intensity distribution, and correcting the autofocus function to obtain accurate observation images. Another significant patent is a method for manufacturing an SOI wafer, which includes a thinning step to adjust the SOI film thickness. This method ensures excellent radial film thickness uniformity after the thinning process.

Career Highlights

Throughout his career, Kuwabara has worked with prominent companies, including Shin-etsu Handotai Co., Ltd. His expertise in semiconductor technology has made him a valuable asset in the industry.

Collaborations

Kuwabara has collaborated with notable individuals such as Kiyoshi Mitani and Naoto Tate, contributing to advancements in semiconductor manufacturing techniques.

Conclusion

Susumu Kuwabara's innovative methods and patents have significantly impacted the semiconductor industry. His dedication to improving wafer manufacturing processes continues to influence the field today.

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