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Los Altos, CA, United States of America

Susan Benjamin Felch

USPTO Granted Patents = 4

Average Co-Inventor Count = 2.8

ph-index = 4

Forward Citations = 178(Granted Patents)

Company Filing History:

Varian Associates, Inc.

Years Active: 1988-1998

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5711812 - Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion (1998-01-27),

2. 5572038 - Charge monitor for high potential pulse current dose measurement (1996-11-05),

3. 4807994 - Method of mapping ion implant dose uniformity (1989-02-28),

4. 4764026 - Semiconductor wafer temperature measuring device and method (1988-08-16),

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