The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 1996
Filed:
May. 07, 1993
Applicant:
Inventors:
Terry T Sheng, San Jose, CA (US);
Charles B Cooper, III, San Jose, CA (US);
Susan B Felch, Los Altos, CA (US);
Charles E Van Wagoner, San Jose, CA (US);
Assignee:
Varian Associates, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
25049221 ; 250397 ;
Abstract
A charge measuring system for determining implantation dose in a PI.sup.3 system with means to compensate for current in the charge sensor which does not arise from positive ions arriving on the wafer.