Sunnyvale, CA, United States of America

Suresh Lakkapragada


Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 112(Granted Patents)


Location History:

  • Sunnyvale, CA (US) (2004 - 2008)
  • Santa Clara, CA (US) (2010)

Company Filing History:


Years Active: 2004-2010

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4 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Suresh Lakkapragada

Introduction: Suresh Lakkapragada, an accomplished inventor based in Sunnyvale, CA, has made significant contributions to the field of lithography with a total of four patents to his name. His work focuses on methods and systems designed to enhance process control within lithography operations, which are essential in various semiconductor manufacturing processes.

Latest Patents: Among his latest inventions, Suresh has developed innovative methods and systems aimed at evaluating and controlling lithography processes. One notable patent addresses the challenge of minimizing within-wafer variation of critical metrics in lithography. This involves measuring properties of the resist applied to the wafer during the lithography process and making adjustments to process parameters accordingly. Such advancements play a crucial role in maintaining the precision and reliability of critical dimensions in semiconductor features.

Career Highlights: Suresh Lakkapragada's career is marked by his tenure at Kla-Tencor Technologies Corporation, where he has been instrumental in pioneering cutting-edge technologies in the lithography space. His expertise in this niche area has led to tangible improvements in the efficiency and accuracy of lithographic equipment used across the semiconductor industry.

Collaborations: Throughout his career, Suresh has worked alongside talented colleagues, including Kyle A. Brown and Matt Hankinson. Their collaboration has fostered an innovative environment where ideas are exchanged, leading to the development of groundbreaking technologies in lithography.

Conclusion: Suresh Lakkapragada represents the innovative spirit of contemporary inventors, focusing on enhancing lithographic precision through his patented methods. His work at Kla-Tencor Technologies Corporation not only exemplifies his dedication to the field but also highlights the collaborative nature of innovation in technology. As he continues to develop further advancements, the impact of his inventions will resonate within the semiconductor industry for years to come.

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