Sunjay Phatak

Title: The Innovative Mind of Sunjay Phatak

Introduction

Sunjay Phatak, an inventive spirit located in Alpine, California, has made significant contributions to the field of laser technology. With a focus on high-performance gas discharge lasers, he has developed a notable patented invention that showcases his expertise and innovative approach.

Latest Patents

Sunjay Phatak holds a patent for a groundbreaking invention titled "Four KHz Gas Discharge Laser System." This advanced excimer laser is capable of generating a high-quality pulsed laser beam at pulse rates of approximately 4,000 Hz, with pulse energies exceeding 5 mJ. The preferred embodiment of this invention highlights an ArF excimer laser, specifically engineered to serve as a light source for integrated circuit lithography. The invention incorporates an improved wavemeter, equipped with specialized software, that effectively monitors the output beam parameters, maintaining the desired wavelength and pulse energy through a rapid PZT driven tuning mirror and precise pulse power charging voltage. Additionally, the design features dual fan motors operating a single tangential fan, ensuring adequate gas flow to eliminate discharge debris from the discharge region during the crucial 0.25 milliseconds between pulses.

Career Highlights

Sunjay Phatak is associated with Cymer, Inc., a leader in laser technology, particularly for semiconductor manufacturing. His role at Cymer has allowed him to leverage his expertise and contribute to the advancement of laser systems that play a vital role in the production of microelectronics.

Collaborations

Throughout his career, Sunjay has collaborated with notable colleagues, including Christian J. Wittak and William N. Partlo. These collaborations have fostered an environment of innovation and have supported the successful development and practical application of advanced laser technologies.

Conclusion

Sunjay Phatak's innovative endeavours in the domain of high-frequency gas discharge lasers exemplify the profound impact of inventors on modern technology. His patent for the Four KHz gas discharge laser system represents a significant advancement in the field, reflecting his dedication to pushing technological boundaries. As he continues his work at Cymer, Sunjay remains a key figure in the ongoing evolution of laser technologies indispensable to integrated circuit lithography and beyond.