Location History:
- Longtan Township, TW (2014)
- Taoyuan County, TW (2022)
Company Filing History:
Years Active: 2014-2022
Title: Innovations of Sung-Po Yang in Wafer Processing Technology
Introduction
Sung-Po Yang is a notable inventor based in Taoyuan County, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in wafer processing technology. With a total of 2 patents to his name, Yang's work has been instrumental in advancing the efficiency and effectiveness of wafer processing systems.
Latest Patents
Yang's latest patents include an "Apparatus for Wafer Processing" and a "Gas Delivery for Uniform Film Properties at UV Curing Chamber." The apparatus for wafer processing features a wafer pedestal designed to support a wafer, along with a radiation source that provides electromagnetic radiation to the wafer. A transparent window is strategically placed between the wafer pedestal and the radiation source, which has a first zone with a rough surface. This design enhances the processing capabilities of the apparatus.
The UV curing system patent includes an enclosure that defines an interior space, housing a UV radiation source and a first window that separates the UV radiation source from the processing chamber. A second window creates a gas channel, allowing for the introduction of cooling gas into the system, which is crucial for maintaining optimal processing conditions.
Career Highlights
Sung-Po Yang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to focus on innovative solutions that enhance wafer processing techniques.
Collaborations
Yang has collaborated with notable colleagues such as Tung-Ching Tseng and Feng-Tao Lee. These collaborations have contributed to the development of advanced technologies in the semiconductor field.
Conclusion
Sung-Po Yang's contributions to wafer processing technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor in the semiconductor industry. His innovations continue to shape the future of semiconductor manufacturing.