Sung Moon Park

Title: Innovations of Sung Moon Park

Introduction

Sung Moon Park is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of plasma processing technology. With a total of 3 patents to his name, Park continues to push the boundaries of innovation in his industry.

Latest Patents

One of his latest patents is a plasma processing apparatus. This apparatus includes a lower electrode that supports a wafer, a focus ring surrounding the edge of the lower electrode, and an edge ring positioned lower than the focus ring. The focus ring is designed with a lower region and an upper region, where the upper region increases in electrical conductivity as it approaches the lower region. Another significant patent is for a substrate processing apparatus and method. This apparatus features a process chamber, a susceptor within the chamber, and both an inner and outer edge ring on the susceptor. The inner edge ring is made of semiconductor material, while the outer edge ring consists of an insulator, with the outer edge ring having an overhang that extends onto the inner edge ring.

Career Highlights

Sung Moon Park is currently employed at Samsung Electronics Co., Ltd., where he applies his expertise in developing advanced processing technologies. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Throughout his career, Park has collaborated with talented individuals such as Jong Woo Sun and Je Woo Han. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Sung Moon Park is a distinguished inventor whose work in plasma processing technology has led to several important patents. His contributions continue to influence the semiconductor industry, showcasing his commitment to innovation and excellence.