Location History:
- Kanagawa, JP (2016)
- Yokohama, JP (2018)
Company Filing History:
Years Active: 2016-2018
Title: Sumito Nakada: Innovator in Charged Particle Beam Technology
Introduction
Sumito Nakada is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 3 patents. His work focuses on advanced methods and apparatuses that enhance the precision and efficiency of charged particle beam applications.
Latest Patents
One of Nakada's latest patents is the "Charged Particle Beam Drawing Apparatus and Charged Particle Beam Drawing Method." This invention features a drawing unit that includes a charged particle source, a deflector, and a stage for placing a target object. The apparatus is designed to perform drawing operations on multiple regions of the target object while calculating the drawing progress ratio based on the drawn area compared to the total area.
Another notable patent is the "Charged Particle Beam Writing Method, Computer-Readable Recording Medium, and Charged Particle Beam Writing Apparatus." This method involves storing position coordinates for diagnosing drift amounts in the charged particle beam. It includes a two-step writing process that allows for precise pattern writing while continuously monitoring and adjusting for drift, ensuring high accuracy in the final output.
Career Highlights
Sumito Nakada is currently employed at Nuflare Technology, Inc., where he continues to innovate in the field of charged particle beam technology. His expertise and inventions have positioned him as a key figure in advancing this specialized area of research and development.
Collaborations
Throughout his career, Nakada has collaborated with notable colleagues, including Osamu Iizuka and Hikaru Yamamura. These partnerships have fostered a collaborative environment that enhances the innovation process and leads to groundbreaking advancements in their field.
Conclusion
Sumito Nakada's contributions to charged particle beam technology exemplify his dedication to innovation and excellence. His patents reflect a commitment to improving the precision and efficiency of charged particle applications, making a lasting impact in the industry.