The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Dec. 11, 2015
Applicant:
Nuflare Technology, Inc., Yokohama-shi, JP;
Inventor:
Sumito Nakada, Yokohama, JP;
Assignee:
NuFlare Technology, Inc., Yokohama-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01); H01J 37/304 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3177 (2013.01); H01J 37/304 (2013.01); H01J 2237/30466 (2013.01); H01J 2237/31793 (2013.01);
Abstract
A charged particle beam drawing apparatus has a drawing unit including a charged particle source, a deflector and a stage on which a target object is placed, to perform drawing with a charged particle beam on a plurality of drawing regions on the target object, and a calculator to calculate a drawing progress ratio on the target object using a ratio of a drawn area of the drawing regions to a total area of the drawing regions.