Company Filing History:
Years Active: 2009
Title: Inventor Sumio Yabe and His Contributions to Substrate Processing Technologies
Introduction
Sumio Yabe, an innovative inventor based in Tokyo, Japan, has made significant advancements in the field of substrate processing. With expertise in developing apparatuses that enhance chemical liquid processes, cleaning, and drying techniques, he has contributed to the efficiency and effectiveness of processing substrates like semiconductor wafers and liquid crystal displays.
Latest Patents
Yabe holds a notable patent that focuses on a substrate processing apparatus, a substrate processing method, and a substrate holding apparatus. This invention is essential for performing various processes while rotating substrates, thereby ensuring precise handling and treatment. The apparatus includes a substrate holder that can rotate the substrate, along with a holder suction unit designed to suck fluid from the substrate holder. Additionally, Yabe's invention features a holding apparatus with rollers that contact the edge of the substrate for effective rotation, complemented by a moving mechanism to maneuver the rollers.
Career Highlights
Sumio Yabe is currently associated with Ebara Corporation, a prominent company in the field of fluid machinery and environmental engineering. His work at Ebara has positioned him as a leading figure in substrate processing technology, allowing him to contribute to advancements that cater to the growing demands of the semiconductor and liquid crystal industries.
Collaborations
Throughout his career, Yabe has collaborated with fellow innovators Kaoru Yamada and Takayuki Saito. These collaborations have fostered an environment of shared knowledge and expertise, pushing the boundaries of substrate technology further and leading to groundbreaking advancements that enhance product quality and processing techniques.
Conclusion
In conclusion, Sumio Yabe's contributions to substrate processing are noteworthy, particularly his patented designs that improve handling efficiency of semiconductor wafers and similar substrates. His ongoing work at Ebara Corporation, alongside esteemed colleagues, continues to influence the industry positively and underscores the importance of innovation in technology.