Suhwan Park

Title: Suhwan Park: Innovator in Inspection and Lithographic Technologies

Introduction

Suhwan Park is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the fields of inspection apparatus and lithographic systems. With a total of 2 patents, his work reflects a commitment to advancing technology in these areas.

Latest Patents

One of Suhwan Park's latest patents is titled "Probe and inspection apparatus including the same." This inspection apparatus features a substrate that extends in two perpendicular directions, with a receiver antenna that includes first and second antenna electrodes. The design incorporates waveguides that enhance the functionality of the antenna electrodes, allowing for improved inspection capabilities.

Another significant patent is the "Immersion lithographic system." This system includes a wafer stage designed to support a wafer, along with a projection optical system that irradiates light toward the wafer. It also features a liquid supply unit that creates an immersion lens, enhancing the light transmission process. Additionally, a vapor supply unit is integrated to align with the immersion lens, further optimizing the lithographic process.

Career Highlights

Suhwan Park has worked with prominent organizations such as Samsung Electronics Ltd. and the Korea Advanced Institute of Science and Technology. His experience in these companies has allowed him to develop and refine his innovative ideas, contributing to his success as an inventor.

Collaborations

Suhwan Park has collaborated with notable colleagues, including Namil Koo and Wonki Lee. These partnerships have likely fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Suhwan Park's contributions to inspection and lithographic technologies demonstrate his expertise and commitment to innovation. His patents reflect a deep understanding of complex systems and a drive to enhance technological capabilities.