The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2026

Filed:

Jul. 11, 2023
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Junbum Park, Suwon-si, KR;

Namil Koo, Suwon-si, KR;

Jaeho Kim, Suwon-si, KR;

Jongsu Kim, Suwon-si, KR;

Suhwan Park, Suwon-si, KR;

Sangwoo Bae, Suwon-si, KR;

Inkeun Baek, Suwon-si, KR;

Ikseon Jeon, Suwon-si, KR;

Martin Priwisch, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3581 (2014.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3581 (2013.01); G01N 21/956 (2013.01); G01N 2021/95676 (2013.01);
Abstract

An inspection apparatus is provided. The inspection apparatus includes a substrate extending in a first direction and a second direction perpendicular to the first direction, a receiver antenna arranged on the substrate and including first and second antenna electrodes, a first waveguide on the substrate, and a second waveguide on the substrate, wherein the first antenna electrode overlaps the first waveguide in a third direction that is perpendicular to the first direction and the second direction, and the second antenna electrode overlaps the second waveguide in the third direction.


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