Location History:
- Milpitas, CA (US) (2016)
- Sunnyvale, CA (US) (2016)
Company Filing History:
Years Active: 2016
Title: Subbalakshmi Sreekala: Innovator in Semiconductor Technology
Introduction
Subbalakshmi Sreekala is a prominent inventor based in Milpitas, CA (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to solving complex challenges in the industry.
Latest Patents
One of his latest patents is focused on gate stack materials for semiconductor applications aimed at improving lithographic overlay. This patent outlines methods and systems for manufacturing film layers with minimal lithographic overlay errors on a semiconductor substrate. The process involves supplying a deposition gas mixture, forming a plasma, and applying current to a plasma profile modulator while rotating the substrate to deposit a film layer effectively.
Another notable patent involves BEOL interconnects utilizing carbon nanotubes. This integrated circuit design includes a substrate with a semiconductor device, layers of dielectric, and an interconnect line made of cross-linked carbon nanotubes. The innovative approach allows for enhanced electrical connectivity and performance in semiconductor devices.
Career Highlights
Subbalakshmi Sreekala is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing industry. His work focuses on advancing technologies that improve the efficiency and effectiveness of semiconductor devices.
Collaborations
Throughout his career, Subbalakshmi has collaborated with notable colleagues, including Michael Wenyoung Tsiang and Praket Prakash Jha. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor field.
Conclusion
Subbalakshmi Sreekala's innovative work in semiconductor technology, particularly in gate stack materials and carbon nanotube interconnects, highlights his significant impact on the industry. His contributions continue to pave the way for advancements in semiconductor manufacturing and design.