Company Filing History:
Years Active: 2002-2004
Title: The Innovative Contributions of Stuart Rounds
Introduction
Stuart Rounds is a notable inventor based in Frederick, MD (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of photoresist removal methods. With a total of 2 patents to his name, Rounds continues to push the boundaries of innovation in his field.
Latest Patents
Stuart Rounds holds two recent patents that showcase his expertise. The first patent is titled "Method of photoresist ash residue removal." This method enables the removal of fluorine-containing residue from a semiconductor substrate by applying a gas and/or vapor that reacts with the residue while the substrate is heated above ambient temperature and exposed to ultraviolet radiation. The process is designed to either volatilize the residue or make it hydrophilic enough to be removed with deionized water. The second patent is "Method of stripping photoresist using re-coating material." This method involves applying a re-coating material on the photoresist layer, ashing the stack comprised of the photoresist layer and the re-coating material, and subsequently removing any remaining re-coating material from the openings in the first layer after ashing.
Career Highlights
Stuart Rounds is currently employed at Axcelis Technologies, Inc., where he applies his innovative ideas to enhance semiconductor manufacturing processes. His work has been instrumental in developing efficient methods for photoresist management, which is crucial for the production of high-quality semiconductor devices.
Collaborations
Stuart collaborates with talented individuals in his field, including coworkers Ivan Berry and Mahmoud Dahimene. Their combined expertise fosters a creative environment that drives innovation and leads to the development of cutting-edge technologies.
Conclusion
Stuart Rounds exemplifies the spirit of innovation in the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and addressing challenges in photoresist management. Through his work at Axcelis Technologies, Inc., Rounds continues to make a lasting impact on the field.