Company Filing History:
Years Active: 2002-2003
Title: The Innovations of Steven P. Goehringer
Introduction
Steven P. Goehringer is a notable inventor based in Newark, DE (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that focus on polishing compositions for semiconductor substrates. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Goehringer's latest patents include innovative solutions for polishing semiconductor substrates. The first patent, titled "Polishing of Semiconductor Substrates," describes an aqueous polishing composition that contains abrasive particles of a metal oxide. This composition features a pH that undergoes pH drift, which is minimized by maintaining an equilibrium concentration of ions provided by the dissolution of the metal oxide. The second patent, "Polishing Compositions for Semiconductor Substrates," presents a polishing composition with a stable pH for use in chemical mechanical polishing (CMP) of semiconductor substrates. This invention comprises high-purity submicron particles of a metal oxide and a soluble metal salt, which adjusts the aqueous concentration of metal ions to the equilibrium solubility of the metal oxide at the desired pH.
Career Highlights
Steven P. Goehringer is currently associated with Rodel Holdings, Inc., a company known for its advancements in semiconductor manufacturing technologies. His expertise in polishing compositions has contributed to the company's reputation as a leader in the industry.
Collaborations
Goehringer has collaborated with notable colleagues, including Terence M. Thomas and Craig D. Lack. Their combined efforts have furthered the development of innovative solutions in semiconductor technology.
Conclusion
Steven P. Goehringer's contributions to the field of semiconductor polishing compositions highlight his role as an influential inventor. His patents reflect a commitment to enhancing semiconductor manufacturing processes, making a lasting impact on the industry.