This inventor holds 1 USPTO granted patent. Top assignee: Mattson Technology, Inc. Active years: 2014.
Company Filing History:
Years Active: 2014
Title: Innovations by Steven M Kennedy
Introduction
Steven M Kennedy is an accomplished inventor based in Portland, OR (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of microlenses. His innovative approach has led to the development of methods that enhance the performance and specifications of microlenses on semiconductor substrates.
Latest Patents
Kennedy holds a patent for "Methods for forming microlenses." This patent describes a process that utilizes an inductively coupled plasma etch process with a gas mixture of CF and CHF. This method allows for the modification of the lens shape of microlens objects on a semiconductor substrate, ensuring they meet specific requirements regarding curvature, height, length, shape, and spacing. The process is designed to be performed in a specialized apparatus that includes a grounded Faraday shield, which minimizes capacitive coupling and reduces sputtering on the microlens surface.
Career Highlights
Kennedy is currently employed at Mattson Technology, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in advancing the technology used in microlens formation, which is critical for various applications in optics and electronics.
Collaborations
Some of his notable coworkers include Linda N Marquez and Cecilia Laura Quinteros. Their collaborative efforts contribute to the ongoing advancements in the technologies developed at Mattson Technology, Inc.
Conclusion
Steven M Kennedy's contributions to the field of semiconductor technology through his innovative methods for forming microlenses highlight his expertise and dedication as an inventor. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.