Company Filing History:
Years Active: 2004-2010
Title: Innovations by Steven E Gianoulakis
Introduction
Steven E Gianoulakis is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His work focuses on improving gas distribution techniques in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Gas baffle and distributor for semiconductor processing chamber." This invention addresses the distribution of deposition gases onto a substrate. In this embodiment, a gas distributor is designed with a body that features a gas deflecting surface and a gas distributor face. The gas deflecting surface defines a cleaning gas pathway, while the gas distributor face is positioned opposite the deflecting surface and faces a substrate support member. This face includes a raised step and at least one set of apertures, which are adapted to distribute deposition gas over the substrate.
Another significant patent is the "Gas distribution showerhead featuring exhaust apertures." This method involves processing a semiconductor workpiece by flowing a process gas through a first plurality of orifices in a gas distribution faceplate. Additionally, it includes removing gas from above the semiconductor workpiece through a chamber exhaust port and a second plurality of orifices in the faceplate.
Career Highlights
Steven E Gianoulakis is currently employed at Applied Materials, Inc., where he continues to innovate in the semiconductor industry. His expertise in gas distribution technologies has made a substantial impact on the efficiency and effectiveness of semiconductor processing.
Collaborations
Throughout his career, Steven has collaborated with talented individuals such as Karthik Janakiraman and Nitin K Ingle. These collaborations have further enhanced the development of innovative solutions in semiconductor technology.
Conclusion
Steven E Gianoulakis is a prominent inventor whose work in semiconductor processing has led to multiple patents and advancements in the field. His contributions continue to shape the future of semiconductor manufacturing.