Location History:
- Blandon, PA (US) (2001)
- Seoul, KR (2004)
- Gilbert, AZ (US) (2009)
Company Filing History:
Years Active: 2001-2009
Title: Innovations by Steven Arthur Rogers
Introduction
Steven Arthur Rogers is an accomplished inventor based in Gilbert, AZ (US). He has made significant contributions to the field of semiconductor processing, holding a total of three patents. His work focuses on improving processes and technologies that enhance efficiency and effectiveness in the industry.
Latest Patents
One of his latest patents is titled "Method for removing organic electroluminescent residues from a substrate." This process involves providing a process gas that includes a fluorine-containing gas, and optionally an oxygen-containing gas and an additive gas. The gas is activated in a remote chamber using an energy source to create reactive species, which then contact the substrate's surface to volatilize and remove organic electroluminescent residues.
Another notable patent is the "On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring." This system allows for real-time monitoring of semiconductor processing effluent by sampling the effluent stream into an absorption cell. UV-Visible light is passed through the sample, and the light is collected by a photo detector for wavelength-selective absorption analysis. This invention aids in determining the concentrations of multiple halogen gases in effluent streams, improving chemical vapor deposition (CVD) chamber cleaning processes.
Career Highlights
Steven works at Air Products and Chemicals, Inc., where he applies his expertise in semiconductor processing. His innovative approaches have contributed to advancements in the field, particularly in the areas of gas analysis and residue removal.
Collaborations
Steven has collaborated with notable colleagues, including Peter James Maroulis and Bing Ji. Their combined efforts have fostered a productive environment for innovation and development in semiconductor technologies.
Conclusion
Steven Arthur Rogers is a prominent inventor whose work has significantly impacted semiconductor processing. His patents reflect a commitment to innovation and efficiency in the industry.