The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2009
Filed:
Sep. 12, 2006
Andrew David Johnson, Doylestown, PA (US);
Peter James Maroulis, Alburtis, PA (US);
Mark Ian Sistern, Audlem, GB;
Martin Jay Plishka, Apachi Junction, AZ (US);
Steven Arthur Rogers, Gilbert, AZ (US);
John Bartram Dickenson, North Wales, PA (US);
Andrew David Johnson, Doylestown, PA (US);
Peter James Maroulis, Alburtis, PA (US);
Mark Ian Sistern, Audlem, GB;
Martin Jay Plishka, Apachi Junction, AZ (US);
Steven Arthur Rogers, Gilbert, AZ (US);
John Bartram Dickenson, North Wales, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.