Steve Kleinke

Title: Innovations by Steve Kleinke

Introduction

Steve Kleinke is an accomplished inventor based in San Jose, CA, with a notable portfolio of six patents. His work primarily focuses on advancements in plasma processing systems, showcasing his expertise in the field of technology and engineering.

Latest Patents

Among his latest innovations is the "Auto-sequencing multi-directional inline processing method." This method allows for the autonomous sequencing of a plasma processing system, enabling the concurrent processing of several substrates. The system is designed to move two substrate trays together into the processing chamber for efficient substrate exchange, while also allowing for the removal of trays one at a time. Additionally, when necessary, the method can move one tray into the processing chamber to remove the susceptor without exposing the chamber to atmospheric conditions. Another significant patent is the "Auto-sequencing inline processing apparatus," which employs a novel architecture that autonomously sequences processing and moves substrates in various directions. Unlike previous systems, this apparatus does not utilize trays, allowing for concurrent processing of multiple substrates.

Career Highlights

Steve has made significant contributions to the field through his work at various companies, including Novellus Systems Incorporated and Orbotech Ltd. Solar, LLC. His innovative approaches have led to advancements in processing technologies that are crucial for the industry.

Collaborations

Throughout his career, Steve has collaborated with notable professionals, including Craig Lyle Stevens and Wendell T. Blonigan. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies.

Conclusion

Steve Kleinke's contributions to the field of plasma processing systems through his patents and collaborations highlight his role as a significant innovator. His work continues to influence advancements in technology and engineering.