The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
May. 20, 2013
Orbotech LT Solar, Llc., San Jose, CA (US);
Wendell Thomas Blonigan, Pleasanton, CA (US);
Masato Toshima, Sunnyvale, CA (US);
Kam S. Law, San Jose, CA (US);
David Eric Berkstresser, Los Gatos, CA (US);
Steve Kleinke, San Jose, CA (US);
Craig Lyle Stevens, Ben Lomond, CA (US);
ORBOTECH LT SOLAR, LLC., San Jose, CA (US);
Abstract
A method for auto-sequencing of plasma processing system for concurrent processing of several substrates. The method autonomously sequence processing and move substrates in different directions as necessary. The method moves two substrate trays together into the processing chamber for substrate exchange, and remove the trays from the chamber one at a time. When needed, the method moves one tray into the processing chamber for removal of the susceptor without exposing the chamber to atmospheric environment.