The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 18, 2014

Filed:

Dec. 10, 2010
Applicants:

Wendell Thomas Blonigan, Pleasanton, CA (US);

Masato Toshima, Sunnyvale, CA (US);

Kam S. Law, San Jose, CA (US);

David Eric Berkstresser, Los Gatos, CA (US);

Steve Kleinke, San Jose, CA (US);

Craig Lyle Stevens, Ben Lomond, CA (US);

Inventors:

Wendell Thomas Blonigan, Pleasanton, CA (US);

Masato Toshima, Sunnyvale, CA (US);

Kam S. Law, San Jose, CA (US);

David Eric Berkstresser, Los Gatos, CA (US);

Steve Kleinke, San Jose, CA (US);

Craig Lyle Stevens, Ben Lomond, CA (US);

Assignee:

Orbotech LT Solar, LLC., San Jose, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.


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