This inventor holds 4 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 2002-2009.
Company Filing History:
Years Active: 2002-2009
Title: The Innovations of Stephen Richard Fox
Introduction
Stephen Richard Fox is a notable inventor based in Hopewell Junction, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work primarily focuses on improving the quality and performance of semiconductor-on-insulator substrates.
Latest Patents
One of his latest patents is titled "Control of buried oxide in SIMOX." This invention describes a method for forming a semiconductor-on-insulator (SOI) substrate. The process involves several steps, including heating a substrate, implanting oxygen into the heated substrate, cooling the substrate, and annealing. This method addresses the challenges of enhancing the quality of buried oxide, particularly in terms of surface roughness, uniform thickness, and breakdown voltage.
Another significant patent is "Divot reduction in SIMOX layers." This method fabricates a silicon-on-insulator (SOI) with a superficial Si-containing layer that has fewer tile and divot defects. The process includes implanting oxygen ions into a Si-containing substrate and annealing it under specific conditions. This innovation not only improves the quality of the SOI substrate but also allows for better optical detection of defects.
Career Highlights
Stephen Fox is currently employed at International Business Machines Corporation (IBM), where he continues to advance semiconductor technologies. His work has been instrumental in developing methods that enhance the performance and reliability of semiconductor devices.
Collaborations
Throughout his career, Stephen has collaborated with several talented individuals, including Neena Garg and Kenneth John Giewont. These collaborations have contributed to the successful development of his innovative patents.
Conclusion
Stephen Richard Fox is a prominent inventor whose work in semiconductor technology has led to significant advancements in the field. His innovative patents reflect his commitment to improving the quality and performance of semiconductor devices.