Company Filing History:
Years Active: 2018-2019
Title: The Innovations of Stephen Dale Coomer
Introduction
Stephen Dale Coomer is an accomplished inventor based in Chandler, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and precision of gas distribution systems in epitaxial processes.
Latest Patents
Coomer's latest patents include a gas distribution apparatus designed for improved film uniformity in an epitaxial system. This innovative gas distribution system aims to achieve better film uniformity on a wafer by utilizing an expansion plenum and a series of proportioning valves. These components work together to ensure equalized pressure or flow along each gas line positioned above the wafer. Another notable patent is for a variable adjustment mechanism that allows for precise matching of vertical positions of two substrates within separate chambers of a reaction system. This vertical adjustment assembly, in conjunction with a main lift driver, enhances the accuracy of substrate positioning, effectively addressing tolerance stack-up errors.
Career Highlights
Stephen Dale Coomer is currently associated with Asm IP Holding B.V., where he continues to innovate and develop advanced technologies in the semiconductor industry. His expertise and inventions have significantly impacted the efficiency of semiconductor processing.
Collaborations
Coomer has collaborated with notable professionals in his field, including Robert Michael Vyne and Timo Bergman. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Stephen Dale Coomer's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in gas distribution systems and substrate processing.