The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2018
Filed:
Feb. 22, 2016
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Stephen Dale Coomer, Chandler, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01L 21/68 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01);
Abstract
A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
Published as:
US2017092531A1; KR20170038156A; TW201721800A; US9960072B2; US2018166315A1; US10312129B2; TWI690021B; KR102585408B1;