This inventor holds 6 USPTO granted patents. Top assignees: Advanced Technology Materials, Inc., Shipley Company LLC. Active years: 1990-2002.
Company Filing History:
Years Active: 1990-2002
Title: The Innovations of Stephen A Fine
Introduction
Stephen A Fine is a notable inventor based in Peabody, MA (US). He has made significant contributions to the field of semiconductor technology, particularly in the development of etchant formulations for silicon oxide compounds. With a total of 6 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of Stephen A Fine's latest patents is a selective silicon oxide etchant formulation that includes a fluoride salt, a chelating agent, and a glycol solvent. This innovative formulation is designed to etch doped silicon oxide compounds, such as BPSG and PSG layers, at rates that are equal to or greater than the etch rate of undoped silicon oxide, such as thermal oxide. The general composition of this formulation includes a chelating agent that is preferably weakly to moderately acidic (0.1-10%; preferably 0.2-2.8%), a fluoride salt that may be ammonium fluoride or an organic derivative of either ammonium fluoride or a polyammonium fluoride (1.65-7%; preferably 2.25-7%), and a glycol solvent (71-98%; preferably 90-98%). Optionally, an amine may also be included in the formulation.
Career Highlights
Throughout his career, Stephen A Fine has worked with several prominent companies in the semiconductor industry. Notable among these are Advanced Technology Materials, Inc. and Shipley Company LLC. His experience in these organizations has allowed him to refine his expertise and contribute to various innovative projects.
Collaborations
Stephen has collaborated with several talented individuals in his field, including William A Wojtczak and James W Thackeray. These collaborations have further enhanced his work and led to advancements in semiconductor technologies.
Conclusion
Stephen A Fine is a distinguished inventor whose contributions to the field of semiconductor technology are noteworthy. His innovative etchant formulations and collaborations with industry professionals have solidified his reputation as a leading figure in his area of expertise.