Company Filing History:
Years Active: 2018-2020
Title: The Innovative Mind of Stephan Andre: Revolutionizing EUV Microlithography
Introduction: Stephan Andre, a notable inventor based in Schwaebisch Gmuend, Germany, has made significant contributions to the field of microlithography. With three patents to his name, he has played a crucial role in advancing projection technology, specifically in the domain of extreme ultraviolet (EUV) lithography.
Latest Patents: Andre's latest patents include developments in projection lenses, projection exposure apparatuses, and projection exposure methods tailored for EUV microlithography. His disclosures describe a sophisticated projection lens designed to image patterns arranged in an object plane into an image plane using electromagnetic radiation from the extreme ultraviolet range. The innovative design incorporates multiple mirrors strategically placed in a projection beam path, enabling precise imaging of mask patterns. Furthermore, a dynamic wavefront manipulation system is included to correct astigmatic wavefront aberrations caused by reticle displacement, ensuring high-quality results in advanced manufacturing processes.
Career Highlights: Andre's career is marked by his association with Carl Zeiss SMT GmbH, a leading company in optical technologies. His work has enhanced the capabilities of microlithographic technologies, which are essential for producing intricate designs in semiconductor manufacturing and other advanced applications. His expertise and inventive spirit continue to propel advancements in the industry.
Collaborations: In his professional journey, Stephan Andre has collaborated with talented colleagues, including Daniel Golde and Toralf Gruner. Together, they have worked on complex projects that leverage their collective knowledge and skills to push the frontiers of microfabrication.
Conclusion: Stephan Andre stands out as a prominent inventor whose work significantly influences the field of microlithography. With his innovative patents and collaborations, he continues to contribute to technological advancements that drive progress in semiconductor manufacturing and beyond. His dedication and expertise illuminate the path for future innovations in this critical area of technology.