This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Hap Handhabungs-, Automatisierungs- Und Präzisionstechnik Gmbh. Active years: 2012.
Company Filing History:
Years Active: 2012
Title: Steffen Krueger: Innovator in Photolithographic Technology
Introduction
Steffen Krueger is a notable inventor based in Munich, Germany. He has made significant contributions to the field of photolithography, particularly through his innovative patent that addresses the challenges associated with mask pellicles.
Latest Patents
Steffen Krueger holds a patent for an "Apparatus and method for the removal of pellicles from masks." This invention provides a universal solution for removing pellicles from masks used in photolithographic processes without causing contamination or damage. The apparatus features at least one grip for manipulating masks, equipped with two fixing elements that apply pressure at the mask's edge. Additionally, it includes a detector for contactless position determination of mounts at the pellicle's outer edge and a heating device for adhesive used in securing pellicles to masks.
Career Highlights
Steffen Krueger is associated with Hap Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH, where he has been instrumental in advancing technologies related to automation and precision engineering. His work has garnered attention for its practical applications in the semiconductor industry.
Collaborations
Steffen collaborates with notable colleagues such as Lothar Andritzke and Holger Brosche, contributing to a dynamic team focused on innovation in their field.
Conclusion
Steffen Krueger's contributions to photolithographic technology through his patent demonstrate his commitment to innovation and excellence in engineering. His work continues to influence the industry positively.