The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Dec. 09, 2008
Lothar Andritzke, Mueglitztal/OT Maxen, DE;
Holger Brosche, Dresden, DE;
Steffen Krueger, Triebischtal/OT Robschuetz, DE;
Steffen Pollack, Dresden, DE;
Klaus-peter Weiss, Pirna, DE;
Hans-joachim Gretzschel, Dresden, DE;
Lothar Andritzke, Mueglitztal/OT Maxen, DE;
Holger Brosche, Dresden, DE;
Steffen Krueger, Triebischtal/OT Robschuetz, DE;
Steffen Pollack, Dresden, DE;
Klaus-Peter Weiss, Pirna, DE;
Hans-Joachim Gretzschel, Dresden, DE;
Abstract
An apparatus and a method for the removal of pellicles from masks which can be used for photolithographic purposes. The pellicles are removed from masks in a universal manner without them being further contaminated or damaged. In an apparatus, at least one grip is present for the manipulation of masks provided with pellicles which has at least two fixing elements which engage at the edge of a mask with exerted pressure force. There are moreover present in this connection at least one detector for the contactless determination of the position of mounts formed at the radially outer edge of pellicles, and a heating device for the heating of an adhesive with which pellicles are fastened to a mask with material continuity, and a removal apparatus of the pellicles from a mask having a mask fixing unit and a pellicle removal unit.