Hap Handhabungs-, Automatisierungs- Und Präzisionstechnik Gmbh

Steffen Krueger

Steffen Pollack

Holger Brosche

Hans-Joachim Gretzschel

Lothar Andritzke

Klaus-Peter Weiss

An apparatus and a method for the removal of pellicles from masks which can be used for photolithographic purposes. The pellicles are removed from masks in a universal manner without them being further contaminated or damaged. In an apparatus, at least one grip is present for the manipulation of masks provided with pellicles which has at least two fixing elements which engage at the edge of a mask with exerted pressure force. There are moreover present in this connection at least one detector for the contactless determination of the position of mounts formed at the radially outer edge of pellicles, and a heating device for the heating of an adhesive with which pellicles are fastened to a mask with material continuity, and a removal apparatus of the pellicles from a mask having a mask fixing unit and a pellicle removal unit.

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Munich, Georgia

Steffen Krueger