This inventor holds 3 USPTO granted patents. Top assignees: Asm Lithography, Asm Lithography B.v.. Active years: 1992-1996.
Location History:
- all from Veldhoven, NL (1992)
- Bergeyk, NL (1992)
- Veldhoven, NL (1996)
Company Filing History:
Years Active: 1992-1996
Title: The Innovations of Stefan Wittekoek
Introduction
Stefan Wittekoek is a notable inventor based in Bergeyk, Netherlands. He has made significant contributions to the field of lithography, particularly in the development of apparatuses for projecting mask patterns on substrates. With a total of 3 patents to his name, Wittekoek's work has had a considerable impact on the industry.
Latest Patents
Wittekoek's latest patents include an "Apparatus for projecting a mask pattern on a substrate." This invention describes a system that utilizes a projection lens to align a mask alignment mark with a substrate alignment mark. The apparatus incorporates means to prevent phase differences caused by reflections at the mask plate within the alignment beam portions received by a detection system. Another significant patent is for an "Apparatus for and method of projecting a mask pattern on a substrate." This projection apparatus features a reference plate with grating marks for alignment with an exposure mask and includes multiple detectors for processing detection signals to enhance image quality.
Career Highlights
Throughout his career, Wittekoek has worked with prominent companies in the lithography sector, including ASML Lithography and ASML Lithography B.V. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in the field.
Collaborations
Wittekoek has collaborated with notable colleagues such as Marinus Aart Van Den Brink and Henk F. Linders. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Stefan Wittekoek's contributions to the field of lithography through his innovative patents and collaborations highlight his importance as an inventor. His work continues to influence advancements in technology and manufacturing processes.