Stefan Seitz

Title: **Innovative Contributions of Inventor Stefan Seitz in Aalen, DE**

Introduction

Stefan Seitz, an accomplished inventor based in Aalen, Germany, has made significant contributions to the field of optical engineering. With a total of two patents to his name, his work primarily focuses on advancements in illumination optics, particularly for projection exposure apparatuses in lithography.

Latest Patents

Stefan Seitz's latest patents showcase his innovative approach to enhancing illumination systems. One of his notable inventions is the "Facet mirror for an illumination optical unit of a projection exposure apparatus." This patent features a facet mirror designed with multiple displaceable individual facets, each equipped with a facet main body and a reflective surface. Importantly, some facets possess a displacement range that allows them to contact a stop surface during specific displacement positions.

His second significant patent is the "Illumination optic for EUV projection lithography." This inventive optical unit illuminates an object field with specialized illumination light. It comprises a first facet mirror that includes several first facets mounted on a mirror carrier, while a second facet mirror follows, consisting of a variety of second facets arranged around a central facet arrangement. The innovative design allows partial beams of illumination light to be guided superimposed into the object field via designated illumination channels. Furthermore, second maximum angle facets positioned at the edge of the second mirror carrier help establish maximum illumination angles deviating from the chief ray incidence on the object field.

Career Highlights

Stefan Seitz is affiliated with Carl Zeiss SMT GmbH, a leading company known for its cutting-edge technology in optical systems and solutions. His contributions to the field have played a pivotal role in enhancing optical performance and efficiency in modern lithography processes.

Collaborations

Throughout his career, Stefan has collaborated with talented professionals like Matthias Mueller and Thomas Fischer. Their collective expertise fosters innovation and advances technological capabilities within their organization.

Conclusion

With his innovative patents and collaborative spirit, Stefan Seitz continues to make a meaningful impact in the field of illumination optics. His work at Carl Zeiss SMT GmbH not only showcases his talent as an inventor but also highlights the importance of collaboration in driving technological advancements. As innovations in optical systems continue to evolve, Stefan's contributions remain a valuable asset to the industry.