Company Filing History:
Years Active: 2019-2024
Title: Innovations of Stanley Wu
Introduction
Stanley Wu is a prominent inventor based in San Ramon, California. He has made significant contributions to the field of technology, particularly in the area of electrostatic chucks and substrate support covers. With a total of seven patents to his name, Wu's work has had a considerable impact on the industry.
Latest Patents
One of Stanley Wu's latest patents is titled "Forming mesas on an electrostatic chuck." This invention involves a body of an electrostatic chuck that comprises mesas disposed on a polished surface. Each mesa includes an adhesion layer, a transition layer, and a coating layer with a hardness of at least 14 GPa. The method for preparing this body includes polishing and cleaning the surface, followed by the deposition of the mesas.
Another notable patent is the "Substrate support cover for high-temperature corrosive environment." This invention relates to an apparatus and method for cleaning a processing chamber. The substrate support cover features a bulk member coated with a fluoride coating, which does not react with cleaning species. This innovation protects the substrate support from contamination during cleaning processes.
Career Highlights
Stanley Wu is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to develop cutting-edge technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Stanley Wu has collaborated with several talented individuals, including Govinda Raj and Lin Zhang. These collaborations have contributed to the advancement of his inventions and the overall success of his projects.
Conclusion
Stanley Wu's innovative contributions to technology, particularly in the realm of electrostatic chucks and substrate support covers, demonstrate his expertise and commitment to advancing the field. His patents reflect a deep understanding of materials and processes that are essential for modern manufacturing.