This inventor holds 3 USPTO granted patents. Top assignee: Ebara Corporation. Active years: 2000-2007.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kanagawa-ken, JP (2000)
- Tokyo, JP (2004)
- Kanagawa, JP (2007)
Company Filing History:
Years Active: 2000-2007
Title: Sota Nakagawa: Innovator in Semiconductor Manufacturing
Introduction
Sota Nakagawa is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of semiconductor device manufacturing, holding a total of 3 patents. His innovative work focuses on improving efficiency and effectiveness in manufacturing processes.
Latest Patents
One of Nakagawa's latest patents is a material supply system in semiconductor device manufacturing plants. This system is designed for small-scale plants aimed at flexible manufacturing. It provides a low-cost pure water supply system without compromising production efficiency. The system produces multiple grades of pure water, which are supplied through pipes to various points of use, such as cleaning, CMP, and lithography. The controller in this system determines whether the required amount of pure water exceeds the capacity available and sends permission signals accordingly.
Another notable patent is the method and apparatus for electromagnetic irradiation of liquid. This apparatus includes an electromagnetic wave source, a surrounding cylinder, and a liquid retention tank. The design allows for a thin film of liquid to flow down the inner wall of the cylinder while being irradiated by electromagnetic waves. This innovative approach ensures that a large volume of liquid can be treated effectively without contaminating the electromagnetic wave source.
Career Highlights
Sota Nakagawa is currently employed at Ebara Corporation, where he continues to develop and refine technologies in semiconductor manufacturing. His work has been instrumental in advancing the efficiency of manufacturing processes, making significant impacts in the industry.
Collaborations
Nakagawa collaborates with talented coworkers, including Toshihiro Tanaka and Yasushi Kosaka. Their combined expertise contributes to the innovative projects at Ebara Corporation.
Conclusion
Sota Nakagawa is a key figure in the field of semiconductor manufacturing, with a focus on innovative solutions that enhance production efficiency. His contributions through patents and collaborative efforts continue to shape the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile