Ebara Corporation

Sota Nakagawa

Toshihiro Tanaka

Koji Mishima

Kunihiro Miyazaki

Soichi Nadahara

Masaji Akahori

Ken Nakajima

Noboru Katsukura

Takehiko Yamada

Eiji Tochikubo

Kinya Usuda

Yasushi Kosaka

Akinori Nishii

In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

Material supply system in semiconductor device manufacturing plant

An electromagnetic wave applying apparatus having an electromagnetic wave source ( ) such as an ultraviolet lamp or the like, a cylinder ( ) surrounding the electromagnetic wave source, a liquid retention tank ( ) disposed around the cylinder, and an inlet portion ( ) for introducing a liquid overflow from the liquid retention tank as a thin film flowing down an inner wall surface of the cylinder, which is irradiated with an electromagnetic wave from the ultraviolet lamp ( ). The electromagnetic wave applying apparatus also has swirling flow forming means for causing the liquid introduced from the inlet portion ( ) onto the inner wall surface of the cylinder to flow as a swirling flow down the inner wall surface. The electromagnetic wave applying apparatus allows a large amount of liquid to be stably treated by the application of an electromagnetic wave without causing the electromagnetic wave source such as an ultraviolet lamp or the like to be contaminated.

Method and apparatus for electromagnetic irradiation of liquid

Method for aerobically treating wastewater and a treatment tank for such

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Kanagawa, Japan

Sota Nakagawa