Company Filing History:

6 out of 25

New Power Plasma Co., Ltd.

patents

Samsung Electronics Co., Ltd.

where one patent can have more than one assignee

Years Active: 2007-2017

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9773645 - Remote plasma generator using ceramic (2017-09-26),

2. 9054146 - Substrate transfer equipment and high speed substrate processing system using the same (2015-06-09),

3. 8409400 - Inductive plasma chamber having multi discharge tube bridge (2013-04-02),

4. 8018163 - Capacitively coupled plasma reactor (2011-09-13),

5. 7952048 - Plasma source with discharge inducing bridge and plasma processing system using the same (2011-05-31),

6. 7477022 - System and method for driving a multi-lamp (2009-01-13),

7. 7285916 - Multi chamber plasma process system (2007-10-23),

Title: Biography of Soon-im Wi

Introduction

Soon-im Wi is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of plasma technology, holding a total of 7 patents. His innovative work has advanced the efficiency and productivity of substrate processing systems.

Latest Patents

One of his latest patents is a remote plasma generator using ceramic. This device includes a body, a driver, and a protection tube. The body features a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flows. The driver generates a magnetic field and plasma within the body, while the protection tube safeguards the plasma generation pipe from damage. Another notable patent is for substrate transfer equipment and a high-speed substrate processing system. This system is designed to continuously load and unload multiple substrates in and out of a process chamber, thereby reducing transfer time and enhancing productivity. The substrate transfer apparatus is strategically installed in the transfer chamber and efficiently transfers substrates between adjacent process chambers.

Career Highlights

Throughout his career, Soon-im Wi has worked with notable companies such as New Power Plasma Co., Ltd. and Gen Co., Ltd. His experience in these organizations has allowed him to refine his expertise in plasma technology and substrate processing.

Collaborations

He has collaborated with esteemed colleagues, including Dae-Kyu Choi and Ja-Woo Lee. These partnerships have contributed

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