The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Jan. 29, 2016
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Ja-woo Lee, Hwaseong-si, KR;
Chung-huan Jeon, Seoul, KR;
Heok-jae Lee, Suwon-si, KR;
Jang-hyoun Youm, Suwon-si, KR;
Sang-jean Jeon, Suwon-si, KR;
Kwang-young Jung, Hwaseong-si, KR;
Sun-uk Kim, Daejeon, KR;
Kang-ho Lee, Daejeon, KR;
Jung-hyun Cho, Yongin-si, KR;
Soon-im Wi, Suwon-si, KR;
Yun-sik Yang, Suwon-si, KR;
Moo-jin Kim, Seoul, KR;
Jang-kyu Choi, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
DANDAN CO., LTD., Yuseong-gu, Daejeon, KR;
NEW POWER PLASMA CO., LTD., Suwon-si, Gyeonggi-do, KR;
Abstract
A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.