Soo-Bok Chin

Title: Innovator Soo-Bok Chin and His Contributions to Semiconductor Fabrication

Introduction

Soo-Bok Chin is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor fabrication, holding a total of 4 patents. His innovative work focuses on methods for monitoring semiconductor processes, which are crucial for the advancement of technology in this area.

Latest Patents

One of his latest patents is titled "Methods for monitoring semiconductor fabrication processes using polarized light." This inventive concept provides apparatuses and methods for monitoring semiconductor fabrication processes in real time using polarized light. The apparatus comprises a light source configured to generate light, a beam splitter to reflect the light toward the wafer being processed, an objective polarizer to polarize the light reflected toward the wafer, and to allow light reflected by the wafer to pass through. Additionally, it includes a blaze grating to separate light reflected by the wafer according to wavelength, an array detector to detect the separated light, and an analyzer to analyze the three-dimensional profile of the structure or pattern being formed in the wafer.

Another patent with a similar focus is also titled "Apparatus and method for monitoring semiconductor fabrication processes using polarized light." This patent reiterates the importance of real-time monitoring in semiconductor fabrication, emphasizing the innovative use of polarized light in the process.

Career Highlights

Soo-Bok Chin is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor fabrication processes.

Collaborations

Throughout his career, Soo-Bok Chin has collaborated with notable colleagues, including Woong-Kyu Son and Deok-Yong Kim. These collaborations have further enriched his research and development efforts in the semiconductor field.

Conclusion

Soo-Bok Chin's contributions to semiconductor fabrication through his innovative patents and work at Samsung Electronics Co., Ltd. highlight his role as a key figure in advancing technology. His focus on real-time monitoring using polarized light represents a significant step forward in the industry.