Yongin-si, South Korea

Song Hwan Park

USPTO Granted Patents = 3 

Average Co-Inventor Count = 5.5

ph-index = 1

Forward Citations = 3(Granted Patents)


Location History:

  • Chungcheongnam-do, KR (2016)
  • Yongin-Si, KR (2019)

Company Filing History:


Years Active: 2016-2025

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3 patents (USPTO):Explore Patents

Title: Innovations of Song Hwan Park

Introduction

Song Hwan Park is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

One of his latest patents is titled "Apparatus for processing a substrate and method of operating the same." This invention includes a reaction tube designed to receive a substrate boat containing multiple substrates for processing. The apparatus features a side cover, a heater, a first gas supplier, a second gas supplier, and a controller. The first gas supplier is positioned at the upper part of the side cover to supply cooling gas at a specific rate, while the second gas supplier is located at the lower part to provide cooling gas at a different rate. The controller is responsible for managing the operation of the reaction tube.

Another significant patent is the "Substrate processing apparatus," which is a batch-type system allowing independent processing of multiple substrates. This apparatus includes a substrate boat with partition plates and connection rods, an internal reaction tube, a gas supply unit, and an exhaust unit. The design ensures that the substrates are loaded separately from the partition plates, enhancing processing capabilities.

Career Highlights

Song Hwan Park has worked with prominent companies in the technology sector, including Eugene Technology Co., Ltd. and SK Hynix Inc. His experience in these organizations has contributed to his expertise in substrate processing technologies.

Collaborations

Throughout his career, Park has collaborated with talented individuals such as Woo Duck Jung and Kyu Hyun Choi. These collaborations have likely enriched his work and led to innovative advancements in his field.

Conclusion

Song Hwan Park's contributions to substrate processing technology are noteworthy, with multiple patents that reflect his innovative spirit. His work continues to influence the industry and pave the way for future advancements.

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